|
|
Metra |
|
| The Metra is
designed as a fully- automated Overlay Registration and Critical Dimension Measurement
System. |
|
High throughput, Class 1 Cleanroom compatibility, and ease of use make this an
excellent tool for high volume production fabs.
|
Metra
|
| Please contact us
so that we may answer specific questions, or provide you with more information on the
Metra Back to Top |
VLS-1 / VLS-2
Video Linewidth System |
|
| The VLS-1 has
been used in the industry for over 18 years, and is still the main source of CD (Critical
Dimensions) process control in several fabs around the world. |
|
VLS-1
|
The VLS-1 Provides fast and repeatable measurements on wafers, photomasks, thin film heads
and other small geometry applications.
|
|
The VLS-2 is the newest member
of the VLS family, and improves on it's predecessor by upgrading the microscope, which
provides a smoother stage, more robust illumination and an automated objective changer.
|
VLS-2
|
| The VLS-1 /
VLS-2 is calibrated to NIST traceable mask standards. The system has user specific
program calibrations that give you maximum calibration flexibility. The systems high reliability is due to the simple
design and very few moving parts.
The system consist of the following
components:
- CCD camera and image rotation system.
- Piezo driven autofocus mechanism.
- Nikon Optiphot 66 Microscope
- Electronics control chassis
- 12" CRT for menu and video display.
Specifications
- Measurement range : 0.7-200um
- Measurement precision:
Wafers sigma = 0.010um
Masks sigma = 0.005um
- Measurement time: 4 seconds for 3um line,
including auto-illumination and auto-focusing
Please contact us
so that we may answer specific questions, or provide you with more information on the
VLS-1
Back
to Top |
Microvision 500 (MV-500) |
|
The MV-500 uses
the same measurement techniques as the VLS-1. The main differences are in the
autofocus and wafer handling systems.
|
MV-500
|
The MV-500 uses a solid state diode laser to perform autofocus. This technique allows for
automated focus control and allows for selectable program focus to achieve the best focal
plane for obtaining repeatable measurements.
|
The wafer handling uses a special stage
to deliver the wafer under the objective and offers the option of manual or auto loading
from a cassette in some configurations.
Specifications:
- Measurement range : 0.7-200um
- Measurement precision:
Wafers sigma = 0.010um
- Measurement time: 4 seconds for 3um line,
including auto-illumination and auto-focusing
Please contact us
so that we may answer specific questions, or provide you with more information on the
MV-500.
Back to Top |
Microvision 215LL
(MV-215LL) |
|
The MV-215LL is
a merging of the MV-15 Inspection Station with the VLS-1. The MV-215LL is
similar to the MV-500 in the use of a solid state diode laser to perform
autofocus. This technique allows for automated focus control and allows for selectable
focus to achieve the best focal plane for obtaining repeatable measurements.
|
The MV-215LL configuration allows the
user the flexibility of an inspection and CD measurement system in one system.
|
|
Specifications
- Measurement range : 0.7-200um
- Measurement precision:
Wafers sigma = 0.010um
- Measurement time: 4 seconds for 3um line,
including auto-illumination and auto-focusing
Please contact us
so that we may answer specific questions, or provide you with more information on the
MV-215LL.
Back to Top |
Microvision 15
(MV-15) |
|
| MV-15
Inspection Station is a programmable system for rapid high magnification inspection of
semiconductor wafers. |
|
|
The MV-15 uses a HeNe spot laser to
perform autofocus, and a specially designed transfer system to deliver the wafer under the
objective.
|
|
| The system also
has a four-cassette loader system that allows for wafer sorting. Please contact us so that we may answer
specific questions, or provide you with more information on the MV-15.
Back to Top |
|
|
MV-10 Inspection Station is a
semi-automated system for rapid high magnification inspection of semiconductor wafers. The
MV-10 uses a HeNe spot laser to perform autofocus, and a specially designed transfer
system to deliver the wafer under the objective. The system also has a four-cassette
loader system that allows for wafer sorting.
Please contact us
so that we may answer specific questions, or provide you with more information on the
MV-10.
Back to Top
The MV-7 Inspection Station is a semi-
automated system for rapid high magnification inspection of semiconductor wafers.
The MV-7 uses a HeNe spot laser to
perform autofocus, and a specially designed transfer system to deliver the wafer under the
objective.The system also has a single cassette loader system that allows for wafer
loading.
Please contact us so that we
may answer specific questions, or provide you with more information on the MV-7.
Back to Top |
|
|
